Hartzell, Allyson L. <br/><br/>
MEMS reliability 
by Allyson L. Hartzell, Mark G. da Silva, Herbert R. Shea. 
 - Boston, MA :  Springer Science+Business Media, LLC,  2011. 
 - xiii, 291 p. :  ill., digital ;  24 cm. 
 - MEMS reference shelf,  1936-4407. .
<br/><br/><label>ISBN: </label>9781441960184 (electronic bk.) 9781441960177 (paper) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems--Reliability.<br/>Engineering.<br/>Electronics and Microelectronics, Instrumentation.
<br/><br/><label>LC Class. No.: </label>TK7875 |b   / H378 2011. 
<br/><br/><label>Dewey Class. No.: </label>621.381  / HAM