TY  - BOOK
AU  - Hartzell,Allyson L.
AU  - da Silva,Mark G.
AU  - Shea,Herbert R.
ED  - SpringerLink (Online service)
TI  - MEMS reliability
SN  - 9781441960184 (electronic bk.)
AV  -  TK7875 |b  H378 2011.
U1  - 621.381 22
PY  - 2011///
CY  - Boston, MA
PB  - Springer Science+Business Media, LLC
KW  - Microelectromechanical systems
KW  - Reliability
KW  - Engineering
KW  - Electronics and Microelectronics, Instrumentation
ER  -