Mack, Chris A. <br/><br/>
Fundamental principles of optical lithography :  the science of microfabrication / 
Chris Mack. 
 - Chichester, West Sussex, England ;  Hoboken, NJ, USA :  Wiley,  c2007. 
 - xvii, 515 p. :  ill. ;  25 cm. 
<br/><br/>Includes bibliographical references and index. 
<br/><br/><label>ISBN: </label>9780470727300 (pbk.) 0470727306 (pbk.) 
<br/><br/><label>LCCN: </label>2007044548 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Integrated circuits--Design and construction.<br/>Microlithography--Industrial applications.
<br/><br/><label>LC Class. No.: </label>TK7874  / .M196 2007 
<br/><br/><label>Dewey Class. No.: </label>621.381531  / MCF