TY  - BOOK
AU  - Mack,Chris A.
TI  - Fundamental principles of optical lithography: the science of microfabrication 
SN  - 9780470727300 (pbk.)
AV  - TK7874 .M196 2007
U1  - 621.381531 22
PY  - 2007///
CY  - Chichester, West Sussex, England, Hoboken, NJ, USA
PB  - Wiley
KW  - Integrated circuits
KW  - Design and construction
KW  - Microlithography
KW  - Industrial applications
N1  - Includes bibliographical references and index
ER  -