MEMS reliability
Hartzell, Allyson L.
MEMS reliability by Allyson L. Hartzell, Mark G. da Silva, Herbert R. Shea. - Boston, MA : Springer Science+Business Media, LLC, 2011. - xiii, 291 p. : ill., digital ; 24 cm. - MEMS reference shelf, 1936-4407. .
9781441960184 (electronic bk.) 9781441960177 (paper)
Microelectromechanical systems--Reliability.
Engineering.
Electronics and Microelectronics, Instrumentation.
TK7875 |b / H378 2011.
621.381 / HAM
MEMS reliability by Allyson L. Hartzell, Mark G. da Silva, Herbert R. Shea. - Boston, MA : Springer Science+Business Media, LLC, 2011. - xiii, 291 p. : ill., digital ; 24 cm. - MEMS reference shelf, 1936-4407. .
9781441960184 (electronic bk.) 9781441960177 (paper)
Microelectromechanical systems--Reliability.
Engineering.
Electronics and Microelectronics, Instrumentation.
TK7875 |b / H378 2011.
621.381 / HAM