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Fundamental principles of optical lithography : the science of microfabrication /

Mack, Chris A.

Fundamental principles of optical lithography : the science of microfabrication / Chris Mack. - Chichester, West Sussex, England ; Hoboken, NJ, USA : Wiley, c2007. - xvii, 515 p. : ill. ; 25 cm.

Includes bibliographical references and index.

ISBN: 9780470727300 (pbk.) 0470727306 (pbk.)

LCCN: 2007044548

Subjects--Topical Terms:
Integrated circuits--Design and construction.
Microlithography--Industrial applications.

LC Class. No.: TK7874 / .M196 2007

Dewey Class. No.: 621.381531 / MCF

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