Fundamental principles of optical lithography : the science of microfabrication / Chris Mack.
Material type:
TextLanguage: English Publication details: Chichester, West Sussex, England ; Hoboken, NJ, USA : Wiley, c2007Description: xvii, 515 p. : ill. ; 25 cmISBN: 9780470727300 (pbk.); 0470727306 (pbk.)Subject(s): Integrated circuits -- Design and construction | Microlithography -- Industrial applicationsDDC classification: 621.381531 LOC classification: TK7874 | .M196 2007
| Item type | Current library | Home library | Call number | Status | Date due | Barcode | Item holds |
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Books
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School of Engineering and Technology | School of Engineering and Technology | 621.381531 MCF (Browse shelf (Opens below)) | Available | 2565 |
Total holds: 0
Includes bibliographical references and index.
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